ZEPTOOLS JS series high-precision step profiler is an advanced self-developed domestic step instrument, using advanced scanning probe technology. By taking microscopic measurements on the sample surface with a scanning probe, the step profiler is able to accurately obtain surface topography information. Its operating principle is based on the interaction force between the probe and the sample surface, and the detection of surface height differences can be achieved by measuring the small displacement of the probe. Performance characteristics include:

1. High precision: The step profiler can measure at the nanometer level, which can reveal the details and characteristics of the microstructure.

2. Large stroke ultra-precision plane scanning: with a large stroke of 70mm, better than 20nm/2mm, it can efficiently obtain surface topography data.

3. Large-bandwidth and large-stroke nano micro-moving stage: with a large stroke of 80um and a frequency of 10kHZ, it can quickly obtain the morphology data of the sample.

4. Ultra-fine pressure constant control: with 0.5mN to 15mN pressure range control, to ensure stability and consistency in the production process.

Introduction to functions and functions

As an ultra-precision contact microscopic profile measuring instrument, ZEPTOOLS JS series high-precision step profiler has a wide range of applications in the semiconductor field. Its main functions and functions include:

1. Measure micro- and nanostructures: Micro- and nano-scale structures such as film thickness and film height, surface topography, surface ripples, and surface roughness can be measured.

2. Detection of surface defects and topography: It can detect the defects and topography of the surface of semiconductor materials, and provide reliable data support for the development and production of semiconductor devices.

3. Improve production efficiency: With the ability of high-speed scanning, it can quickly obtain the topography data of the sample and improve the production efficiency.

The application of JS series high-precision step profiler in the semiconductor field has the following advantages:

1. High-precision measurement capability: With sub-angstrom resolution, it can meet the high-precision measurement needs of microscopic surface topography in semiconductor manufacturing.

2. Ability of rapid measurement: Equipped with a precise displacement table and a rotating platform, it can quickly obtain the elevation data of the surface and improve the measurement efficiency.

3. Wide range of application: It can measure the surface of various materials, including metal, plastic, glass and other materials, and is suitable for different semiconductor manufacturing processes and materials.

The application of JS series high-precision step profiler in the field of semiconductors, through its advanced scanning probe technology and superior performance characteristics, provides reliable technical support for the manufacturing and quality control of semiconductor devices, and helps to promote the development and localization process of China's semiconductor industry.

ZEPTOOLS Step Profiler JS100A

ZEPTOOLS is a scientific instrument company with fully independent intellectual property rights. Since the 1990s, our R&D team has been committed to providing excellent instruments for nanoscience research. At present, the company has a number of product lines including PicoFemto series of in-situ TEM measurement system, in-situ SEM measurement system, ZEM series of benchtop scanning electron microscope, JS series of step profiler, nano-displacement stage, two-dimensional material transfer stage, probe stage and cryogenic system, grating Ruler etc., which have gained a high degree of attention at home and abroad, and filled the gaps of the country's high-end precision instruments in the field of a number of blank.