The ZEPTOOLS TZ Series 3-Axis Probe Station Single Module is a highly integrated motion solution tailored for in-situ experiments in electron microscopes and precision micromanipulation tasks. Through a compact spatial layout design, this module skillfully achieves precise coordinated motion and independent control of the X, Y, and Z axes, providing multi-dimensional ultra-precision positioning capability within an extremely small physical space. As a core component of the in-situ nanoprobing station, the TZ series features dual-mode operation (stepping and scanning), capable of both rapid large-range specimen searching and fine movement with sub-nanometer precision for accurate characterization. Benefiting from its excellent mechanical rigidity and 100% vacuum compatibility, this series excels in cutting-edge fields such as semiconductor chip inspection, electrical measurement of two-dimensional materials, and micro/nano fabrication, ensuring long-term high positioning stability and operational reliability in complex electron microscope environments.

TZ Series：TZ-12、TZ-20、TZ-20K

ZEPTOOLS nanopositioning stages, leveraging their outstanding precision positioning capabilities, are widely applied across multiple fields including the semiconductor industry, precision optical engineering, materials science research, biomedicine, precision metrology and inspection, and aerospace. They deeply empower micro/nano manufacturing, high-end instrument development, and cutting-edge scientific experiments, serving as critically important core components in various high-precision equipment and research platforms.

If you have specific requirements for balancing travel range and precision in semiconductor inspection, micro/nano fabrication, or in-situ microscopy experiments, please feel free to email us at micage@zeptools.com. ZEPTOOLS engineers will provide you with detailed selection consultation and in-depth customization solutions.

Engineered for production environments where speed, precision, and reliability are non-negotiable, our industrial XYZ piezo stage combines three-axis nanometric motion with rugged construction and high-duty-cycle capability. This XYZ piezo stage features a hardened aluminum body, IP54-rated sealing, and shock-absorbing flexures, ensuring consistent performance on fast-paced assembly lines for micro-LED placement, fiber-array alignment, and MEMS testing. With a closed-loop resolution of 0.5 nm and a maximum scanning velocity of 30 mm/s per axis, this XYZ piezo stage enables rapid 3D positioning while maintaining <5 nm RMS jitter—critical for bonding, dispensing, and inspection tasks where micron-level deviations cause costly rejects. The advanced thermal compensation algorithm allows this XYZ piezo stage to sustain its specified accuracy across a 10–50°C temperature range, reducing recalibration downtime by 70% compared to conventional stages.

What differentiates this XYZ piezo stage is its smart controller with EtherCAT, PROFINET, and USB interfaces, enabling seamless integration with PLCs, robotic arms, and vision systems. The controller's adaptive feedforward algorithm optimizes motion profiles for varying payloads (up to 1.5 kg per axis), ensuring that each XYZ piezo stage delivers consistent settling performance—full-stroke steps settle within 8 ms, while small dithering moves (<1 µm) respond in under 1 ms. For multi-station production lines, we offer synchronized operation of up to 32 XYZ piezo stage units, with coordinated 3D interpolation for complex paths such as helical scanning or spherical surface tracking. Additionally, the power-efficient design reduces heat dissipation by 55%, preserving thermal stability in enclosed systems—demonstrating that this XYZ piezo stage is both productive and precision-focused.

Reliability is built into every XYZ piezo stage: each unit undergoes 20 million cycle fatigue testing, 100 g shock testing, and EMI shielding up to 80 V/m, guaranteeing an MTBF exceeding 60,000 hours. Modular construction allows fast field replacement of piezo stacks or sensors without full system disassembly, minimizing production interruptions. Whether upgrading legacy XYZ stages or designing new wafer-handling equipment, this XYZ piezo stage offers the fastest return on investment through increased throughput, lower scrap rates, and reduced maintenance. We provide free on-site commissioning, remote diagnostic tools, and 24/7 technical support for every XYZ piezo stage purchased. Request your evaluation unit now—experience how our XYZ piezo stage transforms industrial precision with a 30-day performance guarantee and same-day shipping for standard models.