The ZEPTOOLS Linear Piezoelectric Positioning Stage series is an ultra-precision motion platform designed for applications demanding ultimate positioning accuracy and high reliability. This series mainly includes the MF series and ML series, utilizing advanced piezoelectric inertial drive technology at its core. It breaks through the accuracy limitations of traditional mechanical transmission, achieving sub-nanometer step resolution and excellent positioning stability. In terms of structural design, the MF and ML series fully consider the requirements of complex research and industrial environments, featuring a compact structure, lubrication-free operation, and 100% vacuum compatibility, enabling long-term, stable operation in ultra-high vacuum or harsh conditions. This stage series is widely used in semiconductor inspection, precision optical alignment, micro/nano fabrication, and in-situ microscopy, providing users with robust, smooth, and highly precise linear motion control solutions.

MF Series: MF30-20、MF30-30、MF30-40、MF30-50、MF30-60、MF40-25

ML Series: ML-15、ML-23、ML-37、ML-92A

ZEPTOOLS nanopositioning stages, leveraging their outstanding precision positioning capabilities, are widely applied across multiple fields including the semiconductor industry, precision optical engineering, materials science research, biomedicine, precision metrology and inspection, and aerospace. They deeply empower micro/nano manufacturing, high-end instrument development, and cutting-edge scientific experiments, serving as critically important core components in various high-precision equipment and research platforms.

If you have specific requirements for balancing travel range and precision in semiconductor inspection, micro/nano fabrication, or in-situ microscopy experiments, please feel free to email us at micage@zeptools.com. ZEPTOOLS engineers will provide you with detailed selection consultation and in-depth customization solutions.

The piezoelectric nanopositioning stage represents the pinnacle of ultra-precision motion engineering, delivering sub-nanometer resolution and exceptional repeatability for advanced microscopy, semiconductor inspection, and fiber-optic alignment. Unlike conventional mechanical stages, this piezoelectric nanopositioning stage leverages solid-state piezo actuators to eliminate backlash, friction, and wear, ensuring maintenance-free operation over billions of cycles. With travel ranges from 10 µm to 2 mm and closed-loop control via integrated strain gauges or capacitive sensors, our piezoelectric nanopositioning stage achieves positioning accuracy below 0.01% of full stroke. Whether for atomic force microscopy (AFM) or interferometry, this piezoelectric nanopositioning stage offers unmatched dynamic performance, with resonant frequencies exceeding 5 kHz in compact form factors, making it ideal for both OEM integration and standalone research platforms.

Designed for versatility, this piezoelectric nanopositioning stage supports multiple axis configurations—from single-axis Z-focus to complex XY and XYZ stacks—with orthogonal motion crosstalk minimized below 5 nm. The proprietary flexure-guided mechanism ensures straightness and flatness within nanometers, while the low-noise piezo driver enables smooth stepping and scanning modes. Every piezoelectric nanopositioning stage undergoes rigorous thermal and vibrational testing to guarantee stability in cryogenic, vacuum, or high-humidity environments. Optional features include integrated position memory, auto-zeroing, and adaptive damping, allowing this piezoelectric nanopositioning stage to adapt to dynamic loads up to 5 kg without compromising settling time. For researchers demanding traceable metrology, each unit ships with a calibration certificate verified against NIST standards.

From biological tissue imaging to quantum dot manipulation, the piezoelectric nanopositioning stage accelerates discovery by providing instant response (sub-millisecond) and hysteresis compensation through advanced feedforward algorithms. Our intuitive software suite (compatible with LabVIEW, Python, and MATLAB) simplifies trajectory generation, while the modular design allows easy retrofit into existing setups. Backed by a 5-year warranty and global technical support, this piezoelectric nanopositioning stage is the trusted choice for over 2,000 laboratories worldwide. Upgrade to the next generation of motion control—where the piezoelectric nanopositioning stage redefines what’s possible at the atomic scale. Contact us today for custom stroke lengths or vacuum-compatible variants of this essential nanopositioning solution.