Scanning Electron Microscope (SEM) is a commonly used material characterization technique that scans the surface of a sample with a focused electron beam and uses the signals generated by the interaction of the electrons with the sample to obtain high-resolution topographic images. However, radiation from the electron beam may cause damage to the sample, especially at high beam densities. This radiation damage may alter the surface morphology and chemical composition of the sample, affecting the accuracy of the experimental results.

There are several methods to mitigate the damage caused by electron beam radiation:

1, reduce the beam density: by increasing the scanning area or reducing the beam current, you can reduce the number of electrons per unit area, thereby reducing radiation damage.

2, the use of low voltage: where possible, the use of lower accelerating voltage can also reduce radiation damage, because the lower energy electrons on the sample penetration ability is weaker.

3, optimize sample preparation: good sample preparation can enhance the stability of the sample to the electron beam. For example, the stress in the sample can be reduced by proper heat treatment, thus reducing radiation damage.

4, control the scanning mode: the use of appropriate scanning mode, such as sequential scanning rather than random scanning, can reduce the repeated radiation on the sample.

5、Use of frozen samples: For biological samples, freeze-drying or liquid nitrogen cooling can be used to immobilize the sample and reduce radiation damage.

6, the use of protective layers: in some cases, the sample surface can be coated with a protective thin layer of material to absorb or disperse the electron beam.

7、Calibration and standardization: Regular calibration and standardization of the SEM to ensure stable performance can reduce radiation damage caused by equipment.

8、Use low-dose techniques: Minimize the total dose of the electron beam when sufficient signal can be obtained.

Understanding the type of sample and expected experimental results can help select the most appropriate method to mitigate radiation damage. Experimenters should choose or combine the above methods to obtain the best experimental results, depending on the specific situation.

ZEPTOOLS ZEM18 Benchtop Scanning Electron Microscope

ZEPTOOLS is a scientific instrument company with fully independent intellectual property rights. Since the 1990s, our R&D team has been committed to providing excellent instruments for nanoscience research. At present, the company has a number of product lines including PicoFemto series of in-situ TEM measurement system, in-situ SEM measurement system, ZEM series of benchtop scanning electron microscope, JS series of step profiler, nano-displacement stage, two-dimensional material transfer stage, probe stage and cryogenic system, grating Ruler etc., which have gained a high degree of attention at home and abroad, and filled the gaps of the country's high-end precision instruments in the field of a number of blank.