A scanning electron microscope (SEM) is a high-resolution microscope used to observe and analyze the surface morphology and structure of solid samples. In SEM, an electron beam is focused and scanned over the surface of the sample, generating signals that correspond to the surface morphology of the sample, which can be collected by a detector and converted into an image. Does the electron beam in SEM damage the sample?

Damage to the sample by the electron beam in SEM depends on the energy and dose of the electron beam. In general, the energy of the electron beam in SEM is low, usually in the range of 1-30 keV, so the damage to most samples is small. However, at high energies, the electron beam can penetrate the sample surface and cause damage, such as evaporation and ablation of the sample surface when observed at high magnification. In addition, the dose of the electron beam also affects the degree of damage to the sample, and a high dose of the electron beam can cause thermal effects and chemical changes on the sample surface, thereby affecting the morphology and structure of the sample.

In order to minimize the damage of the electron beam on the sample, SEM usually uses the following methods, ZEPTOOLS Xiaobian give you a list:

1, reduce the electron beam energy: in the observation, try to use a low energy electron beam to reduce the damage to the sample.

2、Control the dose of the electron beam: By controlling the dose of the electron beam, the damage to the sample can be reduced.

3、Use of freezing technology: When observing, the sample can be frozen using freezing technology to reduce the damage of the electron beam on the sample.

4、Use environmental scanning electron microscope (ESEM): ESEM can observe the sample in low vacuum or environmental conditions, thus reducing the damage of the electron beam on the sample.

5、Use of low-voltage scanning: Low-voltage scanning can be used to reduce the damage of the electron beam on the sample during observation.

6、Use the backscattered electron detector (BSE): BSE can collect backscattered electrons, thus reducing the damage of the electron beam on the sample.

7、Use an X-ray spectrometer (EDS): EDS can collect X-rays to minimize damage to the sample from the electron beam.

The electron beam in SEM causes less damage to the sample, but at high energies and high doses it can cause some damage to the sample. In order to minimize damage to the sample from the electron beam, methods such as lowering the energy of the beam, controlling the dose of the beam, using freezing techniques, using an environmental SEM, using low voltage scanning, using a backscattered electron detector, and using an X-ray spectrometer can be used.

ZEPTOOLS ZEM18 Benchtop Scanning Electron Microscope

ZEPTOOLS is a scientific instrument company with fully independent intellectual property rights. Since the 1990s, our R&D team has been committed to providing excellent instruments for nanoscience research. At present, the company has a number of product lines including PicoFemto series of in-situ TEM measurement system, in-situ SEM measurement system, ZEM series of benchtop scanning electron microscope, JS series of step profiler, nano-displacement stage, two-dimensional material transfer stage, probe stage and cryogenic system, grating Ruler etc., which have gained a high degree of attention at home and abroad, and filled the gaps of the country's high-end precision instruments in the field of a number of blank.