The Step Profiler is a common industrial measuring instrument, which is widely used in universities, research laboratories and research institutes, semiconductors and compound semiconductors, high-brightness LEDs, solar energy, MEMS microelectromechanics, touch screens, automobiles, medical equipment and other industries. It can complete the measurement of film thickness and film height, surface topography, surface ripples and surface roughness of micro and nanostructures.

How it works

How the step gauge works. The main job of the step meter is to measure, when the stylus of the step meter gently slides over the surface of the object to be measured, the tiny peaks and valleys on the surface of the object to be touched will allow the stylus to do some up and down movements while sliding. Therefore, the surface profile is reflected to a certain extent by the movement of the stylus. When the output signal passes through the measured bridge, the output signal is proportional to the displacement of the balance position of the stylus at this moment, and the amplitude modulation signal will appear, after amplification and rectification, the displacement signal will be demodulated from the amplitude modulation signal, and the signal will become correspondingly slow, and the semiconductor thickness test step meter can also be read out in the controller. Noise filters and waviness filters further filter the modulation frequency and external interference signals, and the impact of errors is reduced.

ZEPTOOLS JS series high-precision Step Profiler is a domestic step meter independently developed by the company. At present, it is the first technology in China, breaking through the core technology - large-stroke ultra-precision plane scanning - 70mm, better than 20nm/2mm; Large bandwidth and large stroke nano micro-moving table-80um, 10kHZ; The constant control of ultra-fine pressure, 0.5mN-15mN, breaks the monopoly situation of foreign countries and is an indispensable part of the localization process of semiconductors.

Typical Applications

1. Semiconductor applications

(1) The height of the steps at which the film is deposited

(2) The step height of the resist (soft film material).

(3) Etching rate determination

(4) Chemical mechanical polishing (corrosion, denting, bending)

2. Large-scale substrate application

(1) Printed circuit board (protrusions, step height)

(2) Window coating

(3) Wafer mask

(4) Wafer chuck coating

(5) Polishing plate

3. Glass substrate and display applications

(1) AMOLED

(2) Step step height measurement for LCD screen research and development

(3) Touch panel film thickness measurement

(4) Measurement of solar coating films

4. Thin film application of flexible electronic devices

(1) Organic photodetectors

(2) Organic films printed on film and glass

(3) Touch screen copper trace

ZEPTOOLS Step Profiler JS100A

ZEPTOOLS is a scientific instrument company with fully independent intellectual property rights. Since the 1990s, our R&D team has been committed to providing excellent instruments for nanoscience research. At present, the company has a number of product lines including PicoFemto series of in-situ TEM measurement system, in-situ SEM measurement system, ZEM series of benchtop scanning electron microscope, JS series of step profiler, nano-displacement stage, two-dimensional material transfer stage, probe stage and cryogenic system, grating Ruler etc., which have gained a high degree of attention at home and abroad, and filled the gaps of the country's high-end precision instruments in the field of a number of blank.