In the field of precision measurement, the step profiler, as a core device for characterizing material surface morphology and step height, directly impacts the accuracy of scientific research and production. As a leading domestic manufacturer of precision measuring instruments, Ze攸 Technology's JS series step profilers, with their diverse types, high-precision performance, and flexible upgrade capabilities, have become the preferred tools in the semiconductor and materials science fields. This article will provide a detailed explanation of the main types, core differences, and technological advantages of Ze攸 Technology's step profilers.

I. Main Types of Ze攸 Technology Step Profilers

Ze攸 Technology's JS series step profilers are divided into Manual, Semi-automatic, and Fully automatic three categories, corresponding to the measurement needs of different users.

1. Manual Step Profiler: JS 10C

The JS 10C is an entry-level product for basic manual measurement, suitable for morphology analysis of laboratory or small-batch samples. Its core features are:

Operation Method ：Sample stage movement (X/Y horizontal, RZ rotation) relies on manual control, offering high flexibility but lower efficiency;

Sample Adaptability ：Supports samples up to 6 inches, thickness ≤50mm, suitable for measuring small and medium-sized, opaque or translucent materials (such as silicon, lithium tantalate, glass, etc.);

Technical Specifications ：Maximum measurement range 160μm, vertical resolution 0.05nm (full scale), repeatability error ≤0.5nm (30 repeated scans of a 10μm standard block), standard configuration probe with a radius of curvature ≥2μm.

2. Semi-automatic Step Profiler: JS 100C/200C/300C

The JS 100C/200C/300C are positioned in the mid-to-high-end range, combining manual flexibility with some automated functions, suitable for batch measurement of medium-sized samples. Its upgrades include:

Sample Stage Control ：XY direction electric control, rotary stage resolution up to 0.1°, significantly improving positioning efficiency;

Sample Adaptability ：Supports larger samples (JS100C is 6 inches, JS200C is 8 inches, JS300C is 12 inches), the weight of the main unit increases with the model (350Kg~460Kg), stronger stability;

Technical Specifications ：Inherits the core performance of the manual type (such as 160μm maximum measurement range, 0.05nm vertical resolution), and is equipped with dual cameras (main camera 115x, auxiliary camera 115x) for real-time observation of the measurement process.

3. Fully Automatic Step Profiler: JS 2000C/3000C

The JS 2000C/3000C focuses on industrial-grade large-scale measurement, designed for high-efficiency production scenarios, with the core advantage of "full process automation":

Production Efficiency ：Supports single scan length ≤55mm, WPH (wafers per hour) ≥10 (single-side measurement ≥5 positions), marathon transmission test >500, meeting the high-frequency needs of production lines;

Intelligence ：Integrated image recognition system (positioning accuracy better than ±10μm), can automatically identify wafer position and plan measurement path;

Compatibility ：Supports 6-inch and 8-inch wafers, thickness ≤50mm, materials cover silicon, lithium tantalate, glass, etc., suitable for wafer testing in semiconductor manufacturing.

II. Core Differences between Different Types of Step Profilers

1. Automation Level and Efficiency

Manual type relies on manual operation, suitable for small-batch, high-precision scientific research scenarios; semi-automatic type improves positioning efficiency through electric sample stage, suitable for medium-batch R&D or small production lines; fully automatic type achieves "one-button measurement" through image recognition and mechanical automation, and is the preferred choice for large-scale mass production testing.

2. Sample Adaptability

In terms of sample size, the manual type only supports 6 inches, the semi-automatic type covers 6-12 inches, and the fully automatic type is compatible with 6-8 inches (focus on wafers); in terms of sample thickness, all three types support ≤50mm, meeting the needs of most materials.

3. Technical Configuration and Cost

The manual type has a main unit weight of only 60Kg and the lowest cost; the semi-automatic type, due to electric control and a larger sample stage, weighs over 350Kg and has a moderate cost; the fully automatic type integrates image recognition and a high-stability mechanical structure, resulting in the highest cost but significantly improved efficiency.

III. Technological Advantages of Ze攸 Step Profilers: Dual Assurance of Precision and Flexibility

1. Dual LVDT Sensors, Industry-Leading Precision

The Ze攸 JS series is equipped with dual LVDT sensors (probe LVDT detects pressure, micro-motion stage LVDT feedback displacement), with a vertical resolution of 0.05nm, repeatability error ≤0.5nm (10μm standard block), linearity error < one thousandth, far exceeding similar products on the market.

2. Flexible Upgrade Scheme, Reducing Long-Term Costs

The JS series supports "later compatibility upgrade to 1mm range", only requiring the replacement of the probe component; the JSB series can be upgraded to the JSC series by replacing the coarse adjustment stage and sheet metal shell, significantly extending the service life of the equipment.

3. Multi-Scenario Adaptability, Covering Scientific Research and Industry

From manual laboratory measurement to fully automatic production line testing, Ze攸 step profilers meet the needs of different users through type segmentation, and with the high scalability of the ZS series (step maximum height 1000μm, repeatability 0.4nm to be verified), further consolidating its competitiveness in the field of precision measurement.

Conclusion

Ze攸 Technology's JS series step profilers, with a full range of types from "manual-semi-automatic-fully automatic", combined with dual LVDT sensors, flexible upgrades, and other technological advantages, provide a full-chain solution for scientific research institutions and industrial enterprises from basic research to large-scale production. Whether it is fine morphology analysis in the laboratory or efficient wafer testing on the production line, Ze攸 step profilers can help users improve R&D efficiency and product quality with high precision and high reliability.

ZEPTOOLS Technology JS Series Step Instrument