ZEPTOOLS DMD Maskless Aligner | Fabrication of High-Performance Two-Dimensional Palladium Diselenide Long-Wave Infrared Focal Plane Arrays
Long-wave infrared detection technology holds core application value in military, medical, and industrial security fields. Its detection band aligns well with the thermal radiation peak of room-temperature objects, making it key to achieving uncooled thermal imaging. Currently, vanadium oxide and amorphous silicon, with their excellent temperature coefficient of resistance and tunable resistivity, have become the mainstream thermosensitive materials for uncooled infrared focal plane arrays. However, the research community continues to seek higher-performance alternatives. Palladium diselenide (PdSe₂), as an emerging two-dimensional semiconductor with layer‑tunable bandgap, excellent chemical stability, and good compatibility with low‑power CMOS back‑end‑of‑line processes, is regarded as an ideal platform for developing next‑generation high‑performance, low‑cost infrared detectors.