Nanoprobe Station

Nanoprobe Station

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Product Description

In-Situ SEM Accessories

PicoFemto Nanoprobe Station for SEM

Precise positioning in three-dimensional space, high-vacuum compatible  
A powerful tool for micro/nano manipulation and in-situ measurement

Nano manipulation | In-situ measurement | High-vacuum compatible | Optional multi-probe configuration

ZEPTOOLS PicoFemto Nanoprobe Station for SEM achieves precise positioning in three-dimensional space. It features small size, large travel range, high precision, and ease of operation, while also being high-vacuum compatible. It is an important in-situ functional accessory for scanning electron microscopes. Multiple three-axis probe stations can be installed in a single SEM chamber. The platform can be equipped with various manipulation and measurement heads such as electrical probes, fiber-optic probes, nano tweezers, diamond nano-mechanical indenters, and microinjectors, enabling micro/nano manipulation and measurement.

The standard configuration includes the probe body, a base compatible with SEM/FIB, a vacuum feedthrough flange, a probe controller, and a control handle. Optional items include low-temperature and high-temperature sample stages, fiber-optic chucks and fiber-optic vacuum feedthroughs, EBIC kits, and more, allowing flexible expansion of various experimental capabilities.

Product Features

Compact and rigid, high-precision flexure guidance

Compact structure with high rigidity

Zero-clearance, high-precision flexure hinge guidance system

Piezoelectric ceramic displacement stage with ultra-long service life

Position feedback can be added internally as required

Wide range of applications: nanomaterial manipulation, electrical/optical and other physical property measurements of nanodevices, biological cell and DNA manipulation, etc.

Compatible with SEM: JEOL, Hitachi, FEI, TESCAN, etc.

Main Technical Specifications

Dimensions and structure, motion precision, and expansion configurations

Dimensions and Structure

Compact and small form factor for a single probe

High flatness of the sample stage surface

Overall lightweight design

Motion and Precision

Three-axis XYZ large-stroke motion

Supports rapid motion and nanometer-level fine adjustment

Fine-tuning resolution up to the nanometer level

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Application Cases

Examples of micro/nano manipulation and in-situ measurement

Nanoprobe Station Application Case 1
Nanoprobe Station Application Case 2
Nanoprobe Station Application Case 3
Nanoprobe Station Application Case 4
Nanoprobe Station Application Case 5
01Contrast Inversion in Electron-Beam-Induced Current Imaging of Carbon Nanotube Devices Modulated by Secondary Electron Emission›

Selected Customers

Trusted by numerous universities, research institutions, and enterprises

Selected Customers

Start Your Journey in Nanoscale Manipulation

Independently developed by ZEPTOOLS, providing a complete set of micro-nano analysis solutions

Phone: +86-400-966-2800

Email: micage@zeptools.com

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