In-Situ SEM Accessories

PicoFemto Thermoelectric Chip Stage for SEM

Simultaneous application of thermal field and electrical signal  
Real-time monitoring and characterization of evolution at the nanoscale

In-situ thermoelectric | MEMS chip | Wide temperature range heating | Electrical measurement

ZEPTOOLS PicoFemto Thermoelectric Chip Stage for SEM uses MEMS micromachining technology to build an experimental environment within the in-situ sample stage, simultaneously applying a thermal field and electrical signals to the sample through the MEMS chip.

Combined with multiple characterization modes such as EDS, it can monitor in real time and dynamically, at the nanoscale, the evolution process of samples under coupled thermal-electrical conditions, providing direct microscopic evidence for materials research.

Main Performance Specifications

Covering SEM compatibility, thermal field loading, and electrical measurement

Compatible with specified models of scanning electron microscopes

Based on MEMS micromachining technology, with a thermal-electrical experimental environment integrated within the stage

Can simultaneously apply a thermal field and electrical signals, combined with multi-mode characterization such as EDS

Enables high-temperature heating with stable temperature control and low sample drift at high temperatures

The chip is compatible with TEM-MEMS in-situ chip sample holders

Supports automatic I-V / I-t measurement with automatic data saving, and can be combined with electrical measurement

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Selected Customers

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Independently developed by ZEPTOOLS, providing a complete set of micro-nano analysis solutions

Phone: +86-400-966-2800

Email: micage@zeptools.com