JS100C / JS200C / JS300C Semi-Automatic Stylus Profiler

Semi-Automatic Precision Metrology
Efficient Inspection Solution for Industrial and Research Scenarios

Motorized Positioning | Comprehensive Functions

ZEPTOOLS JS100C / JS200C / JS300C Semi-Automatic Stylus Profiler (Probe-Type Profiler), this series is a domestically developed semi-automatic high-precision stylus profiler, designed for industrial and research scenarios such as semiconductors, optoelectronics, and MEMS, supporting measurement of wafers of different sizes and various samples. It adopts motorized precision control, with an efficient and stable measurement process, enabling step height, roughness, stress and 3D topography scanning imaging, with reliable performance and excellent repeatability. The modular structure is easy to maintain, and localized development brings rapid-response after-sales service, fully catering to the usage habits of domestic users.

Main Technical Parameters

Full Series Coverage, Choose the Stylus Profiler You Prefer

Product Model	JS10C	JS100C / 200C / 300C	JS2000C / 3000C
Automation Level	Manual Version	Semi-Automatic Version	Fully Automatic Version
Wafer Size	6 inch	6 / 8 / 12 inch	8 / 12 inch (compatible with lower sizes)
Motion Control	Manual Control (X/Y) Rotation (RZ)	Motorized Control (X/Y) Rotation (RZ)	Fully Automatic Precise Positioning and Transfer
Software Functions	Step Height, Roughness, etc. Surface Topography Measurement	Step Height, Roughness and Other Surface Topography Measurement Stress Measurement and 3D Scanning Imaging	Data Processing: Step Height, Roughness, Flatness and Warpage Measurement Stress Testing and 3D Scanning Imaging Data Communication: SECS Communication Interface