JS2000C / JS3000C Fully Automatic Stylus Profiler

Fully Automatic Production-Type Metrology
Core Equipment for Large-Size Wafer Scale Inspection

Intelligent & Efficient | Production Line Compatible

ZEPTOOLS JS2000C / JS3000C Fully Automatic Stylus Profiler (Probe-Type Profiler), this series is a high-end fully automatic production-type stylus profiler, built for large-size wafer scale inspection, featuring intelligent image recognition and fully automatic measurement capabilities, enabling high-speed and stable batch inspection, and adapting to the high-efficiency operation requirements of production lines. The instrument supports comprehensive topography and stress measurement functions, with accurate and stable data and excellent long-term consistency. It is equipped with standardized communication interfaces, and can seamlessly connect to factory automation systems. It is the core equipment for high-end manufacturing and semiconductor localization metrology.

Main Technical Parameters

Full Series Coverage, Choose the Stylus Profiler You Prefer

Product Model	JS10C	JS100C / 200C / 300C	JS2000C / 3000C
Automation Level	Manual Version	Semi-Automatic Version	Fully Automatic Version
Wafer Size	6 inch	6 / 8 / 12 inch	8 / 12 inch (compatible with lower sizes)
Motion Control	Manual Control (X/Y) Rotation (RZ)	Motorized Control (X/Y) Rotation (RZ)	Fully Automatic Precise Positioning and Transfer
Software Functions	Step Height, Roughness, etc. Surface Topography Measurement	Step Height, Roughness and Other Surface Topography Measurement Stress Measurement and 3D Scanning Imaging	Data Processing: Step Height, Roughness, Flatness and Warpage Measurement Stress Testing and 3D Scanning Imaging Data Communication: SECS Communication Interface