Nanopositioning Stage

TZ Series 3-Axis Nanoprobe Station Single Module

Three-axis precision coordination, sub-nanometer positioning    
The core motion module for in-situ nanoprobe stations

Piezoelectric Inertial Drive | XYZ / XYR Three-Axis | 100% Vacuum Compatible

The ZEPTOOLS TZ Series 3-Axis Nanoprobe Station Single Module is a highly integrated motion solution tailored for electron microscope in-situ experiments and precision micro-manipulation tasks. Through a compact spatial layout design, this series cleverly achieves precision coordination and independent control of XYZ three axes, providing multi-dimensional ultra-precision positioning capability within an extremely small physical space. As the core component of the in-situ nanoprobe station, the TZ series features dual-mode operation of stepping and scanning, satisfying both rapid sample searching over a large range and fine motion with precise characterization at the sub-nanometer level.

Thanks to its exceptional mechanical rigidity and 100% vacuum compatibility, this series performs outstandingly in cutting-edge fields such as semiconductor chip inspection, electrical measurement of 2D materials, and micro/nano machining, ensuring extremely high positioning stability and operational reliability over the long term in complex electron microscope environments.

Main Technical Specifications

Precision Drive and Stable Structure

Active Axis: XYZ-axis / XYR-axis

Drive Method: Piezoelectric inertial drive

Minimum Displacement: Nanometer-level step resolution

Stage Body Material: Titanium alloy / Stainless steel

Guiding Structure: Cross roller guide

Product Models

TZ Series, covering diverse travel requirements

TZ Series: TZ-12, TZ-20, TZ-20K

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Application Fields

Precision Positioning, Empowering Multiple Fields

With its excellent precision positioning capability, the ZEPTOOLS Nanopositioning Stage is widely used in the semiconductor industry, precision optical engineering, materials science research, biomedical, precision metrology and inspection, and aerospace, among many other fields. It deeply empowers micro/nano manufacturing, high-end instrument development, and frontier scientific experiments, serving as a critical core component in various high-precision equipment and research platforms.

Selected Customers

The trusted choice of numerous universities, research institutions, and enterprises

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Independently developed by ZEPTOOLS, providing selection consulting and in-depth customization solutions

Phone: +86-400-966-2800

Email: micage@zeptools.com