Nanopositioning Stage

MZ Series Z-Axis Lifting Stage

Precision vertical displacement, nanometer-level stepping    
High orthogonality and motion smoothness

Piezoelectric Inertial Drive / Ultrasonic Drive | Constant-Force Spring Compensation | Cross Roller Guide

The ZEPTOOLS MZ Series Z-Axis Lifting Stage is an ultra-precision motion platform designed specifically to meet precision vertical displacement requirements. This series adopts high-stability guides and advanced drive technology, ensuring extremely high orthogonality and motion smoothness during vertical lifting. Certain models are specially equipped with a constant-force spring compensation mechanism, which effectively counteracts the effect of load gravity, maintaining exceptional nanometer-level step resolution and positioning stability while ensuring high load-carrying capacity.

The MZ series lifting stage features a sturdy and compact structural design. With its excellent mechanical rigidity and motion accuracy, it is widely used in optical lens alignment, probe testing height adjustment, and vertical axis positioning in micro/nano machining systems. The entire series supports a high degree of customization and offers excellent environmental compatibility, adapting to various vacuum or cleanroom working environments.

Main Technical Specifications

Precision Drive and Stable Structure

Active Axis: Z-axis vertical motion

Drive Method: Piezoelectric inertial drive / Ultrasonic drive

Minimum Displacement: Nanometer-level step resolution

Stage Body Material: Aluminum alloy / Stainless steel

Guiding Structure: Cross roller guide

Position Feedback: Incremental linear encoder

Product Models

MZ Series, covering diverse travel requirements

MZ Series: MZ50-10B, MZ70-10B, MZ45-4.5A, MZ70-10A

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Application Fields

Precision Positioning, Empowering Multiple Fields

With its excellent precision positioning capability, the ZEPTOOLS Nanopositioning Stage is widely used in the semiconductor industry, precision optical engineering, materials science research, biomedical, precision metrology and inspection, and aerospace, among many other fields. It deeply empowers micro/nano manufacturing, high-end instrument development, and frontier scientific experiments, serving as a critical core component in various high-precision equipment and research platforms.

Selected Customers

The trusted choice of numerous universities, research institutions, and enterprises

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Independently developed by ZEPTOOLS, providing selection consulting and in-depth customization solutions

Phone: +86-400-966-2800

Email: micage@zeptools.com