Nanopositioning Stage

XYMF Series 2-Axis Nanopositioning Stage

Sub-nanometer stepping, dual-axis synchronization  
The reliable choice for 2D ultra-precision positioning

XYMF Series | Piezoelectric Inertial Drive | Non-contact Full-Closed-Loop Encoder | 100% Vacuum Compatible

The ZEPTOOLS XYMF Series 2-Axis Nanopositioning Stage is a core motion module designed for complex 2D spatial precision positioning requirements. This series adopts advanced piezoelectric inertial drive technology, highly integrating the XY dual-dimensional motion axes to achieve sub-nanometer step resolution within a macroscopic travel range.

In terms of structural design, the XYMF series features a compact structure and extremely high mechanical rigidity, ensuring synchronization of dual-axis motion and excellent orthogonality accuracy; the system incorporates a high-precision non-contact linear encoder, supporting full closed-loop control to guarantee exceptional repeat positioning performance and long-term stability. With its lubrication-free and 100% vacuum-compatible characteristics, this series is widely used in semiconductor chip inspection, lithography machine workpiece stages, microbial manipulation, and ultra-precision assembly, among other cutting-edge fields.

Main Technical Specifications

Precision Drive and Stable Structure

Active Axis: XY dual-axis motion

Drive Method: Piezoelectric inertial drive

Minimum Displacement: Nanometer-level step resolution

Stage Body Material: Aluminum alloy

Guiding Structure: Cross roller guide

Position Feedback: Incremental linear encoder

Product Models

XYMF Series, covering diverse travel requirements

XYMF Series: XYMF110-65, XYMF125-75, XYMF138-100, XYMF140-85, XYMF155-95, XYMF158-120, XYMF170-100, XYMF180-110

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Application Fields

Precision Positioning, Empowering Multiple Fields

With its excellent precision positioning capability, the ZEPTOOLS Nanopositioning Stage is widely used in the semiconductor industry, precision optical engineering, materials science research, biomedical, precision metrology and inspection, and aerospace, among many other fields. It deeply empowers micro/nano manufacturing, high-end instrument development, and frontier scientific experiments, serving as a critical core component in various high-precision equipment and research platforms.

Selected Customers

The trusted choice of numerous universities, research institutions, and enterprises

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Independently developed by ZEPTOOLS, providing selection consulting and in-depth customization solutions

Phone: +86-400-966-2800

Email: micage@zeptools.com