Nanopositioning Stage

RF Nano Piezoelectric Rotation Stage Series

Compact body, fine angular displacement control    
The reliable choice for precision rotary motion

RF Series | Piezoelectric Inertial Drive | Wide-Range Rotation | Closed-Loop Angular Positioning

The ZEPTOOLS RF Nano Piezoelectric Rotation Stage Series is a professional-grade motion platform developed to meet high-precision angular displacement control requirements. This series features advanced piezoelectric drive technology at its core, achieving exceptional angular positioning resolution and motion stability while maintaining an extremely compact physical size, and offering a wide rotation travel range.

This series integrates a high-resolution displacement feedback sensor for real-time position monitoring, ensuring closed-loop control accuracy in complex operating environments. Its design fully balances high rigidity and operational reliability, with excellent environmental adaptability, making it an indispensable core motion module in precision optical alignment, semiconductor inspection, and micro/nano machining.

Main Technical Specifications

Precision Rotation and Stable Structure

Active Axis: R-axis rotary motion

Drive Method: Piezoelectric inertial drive

Repeat Positioning Accuracy: High-precision repeat positioning accuracy

Stage Body Material: Aluminum alloy / Stainless steel

Bearing Structure: Cross roller bearing

Position Feedback: Incremental grating encoder disc

Product Models

RF Series, covering diverse travel requirements

RF Series: RF-33, RF-5950, RF-8382

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Application Fields

Precision Positioning, Empowering Multiple Fields

With its excellent precision positioning capability, the ZEPTOOLS Nanopositioning Stage is widely used in the semiconductor industry, precision optical engineering, materials science research, biomedical, precision metrology and inspection, and aerospace, among many other fields. It deeply empowers micro/nano manufacturing, high-end instrument development, and frontier scientific experiments, serving as a critical core component in various high-precision equipment and research platforms.

Selected Customers

The trusted choice of numerous universities, research institutions, and enterprises

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Independently developed by ZEPTOOLS, providing selection consulting and in-depth customization solutions

Phone: +86-400-966-2800

Email: micage@zeptools.com