Nanopositioning Stage

Linear Piezoelectric Nanopositioning Stage Series

Sub-nanometer stepping, vacuum compatible  
The reliable choice for ultra-precision linear motion

MF Series | ML Series | Piezoelectric Inertial Drive | 100% Vacuum Compatible

The ZEPTOOLS Linear Piezoelectric Nanopositioning Stage Series is an ultra-precision motion platform designed for applications demanding the ultimate in positioning accuracy and high reliability. This series primarily includes the MF Series and the ML Series, featuring advanced piezoelectric inertial drive technology that breaks through the precision limitations of traditional mechanical transmission, achieving sub-nanometer step resolution and exceptional positioning stability.

In terms of structural design, the MF and ML series fully account for the demands of complex scientific research and industrial environments, featuring a compact structure, no lubrication required, and 100% vacuum compatibility, enabling long-term stable operation in extreme vacuum or harsh environments. This series of stages is widely used in semiconductor inspection, precision optical alignment, micro/nano machining, and in-situ microscopic measurement, providing users with robust, smooth, and highly precise linear motion control solutions.

Main Technical Specifications

Precision Drive and Stable Structure

Active Axis: Single-axis X-direction linear motion

Drive Method: Piezoelectric inertial drive

Minimum Displacement: Nanometer-level step resolution

Stage Body Material: Stainless steel

Guiding Structure: Cross roller guide

Position Feedback: Incremental linear encoder

Product Models

Two major series, MF and ML, covering diverse travel requirements

MF Series: MF30-20, MF30-30, MF30-40, MF30-50, MF30-60, MF40-25

ML Series: ML-15, ML-23, ML-37, ML-92A

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Application Fields

Precision Positioning, Empowering Multiple Fields

With its excellent precision positioning capability, the ZEPTOOLS Nanopositioning Stage is widely used in the semiconductor industry, precision optical engineering, materials science research, biomedical, precision metrology and inspection, and aerospace, among many other fields. It deeply empowers micro/nano manufacturing, high-end instrument development, and frontier scientific experiments, serving as a critical core component in various high-precision equipment and research platforms.

Selected Customers

The trusted choice of numerous universities, research institutions, and enterprises

Start Your Ultra-Precision Motion Control Journey

Independently developed by ZEPTOOLS, providing selection consulting and in-depth customization solutions

Phone: 400-966-2800

Email: micage@zeptools.com