Nanopositioning Stage

Ultrasonic Piezo Nanopositioning Stage Series

Ultrasonic drive, high speed and long travel  
The reliable choice for ultra-precision motion

CSMF | CSML | CSMZ | CSXYMF Series | Ultrasonic Drive | 100% Vacuum Compatible

The ZEPTOOLS Ultrasonic Piezo Nanopositioning Stage Series is an ultra-precision motion platform developed specifically to meet the demands of high-speed, long-travel, and high-precision motion control. This series features high-performance ultrasonic drive technology at its core, significantly enhancing the dynamic response speed and motion smoothness of the stage. It effectively overcomes the speed limitations of traditional drive methods while still delivering exceptional positioning resolution and high rigidity within a limited space.

Thanks to the unique advantages of ultrasonic drive, this series of stages offers extremely high position holding force when power is off, while maintaining the product's signature lubrication-free and 100% vacuum-compatible characteristics. Whether in precision metrology for the semiconductor industry or micro-manipulation tasks in biotechnology, the Ultrasonic Piezo Nanopositioning Stage Series provides efficient and reliable motion assurance.

Main Technical Specifications

Precision Drive and Stable Structure

Active Axis: X-axis (XY-axis) linear motion

Drive Method: Ultrasonic drive

Minimum Displacement: Nanometer-level step resolution

Stage Body Material: Aluminum alloy

Guiding Structure: Cross roller guide

Position Feedback: Incremental linear encoder (or absolute)

Product Models

Four major series, covering diverse travel and axis requirements

CSMF Series: CSMF110-65, CSMF125-75

CSML Series: CSML50-20, CSML50-50, CSML75-40, CSML75-60, CSML75-100, CSML100-100, CSML100-200, CSML150-150, CSML150-200

CSMZ Series: CSMZ85-10

CSXYMF Series: CSXYMF110-65, CSXYMF125-75

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Application Fields

Precision Positioning, Empowering Multiple Fields

With its excellent precision positioning capability, the ZEPTOOLS Nanopositioning Stage is widely used in the semiconductor industry, precision optical engineering, materials science research, biomedical, precision metrology and inspection, and aerospace, among many other fields. It deeply empowers micro/nano manufacturing, high-end instrument development, and frontier scientific experiments, serving as a critical core component in various high-precision equipment and research platforms.

Selected Customers

The trusted choice of numerous universities, research institutions, and enterprises

Start Your Ultra-Precision Motion Control Journey

Independently developed by ZEPTOOLS, providing selection consulting and in-depth customization solutions

Phone: +86-400-966-2800

Email: micage@zeptools.com