Nanopositioning Stage

Piezoelectric Tilt Stage Series

High-rigidity angular tilt motion, precision optical path alignment   
Piezo-driven ultra-precision tilt platform

Piezoelectric Inertial Drive | R-Axis Tilt | Arc Grating Closed-Loop

The ZEPTOOLS Piezoelectric Tilt Stage Series is an ultra-precision motion platform designed specifically to meet complex optical path alignment and precision angular adjustment requirements. This series features advanced piezoelectric drive technology at its core, achieving high-rigidity angular tilt motion within a limited space through a precision-engineered mechanical structure, providing excellent angular control capability within an extremely small volume.

The tilt stage integrates a high-resolution arc grating sensor, which, combined with advanced control algorithms, delivers exceptional closed-loop control accuracy and repeat positioning performance. Its motion is smooth with rapid response, making it ideal for applications with stringent dynamic performance requirements, such as semiconductor inspection, precision optical adjustment, and beamline experiments. Thanks to its all-solid-state structure and lubrication-free characteristics, this series exhibits excellent vacuum compatibility, ensuring long-term operational stability under various special working conditions.

Main Technical Specifications

Piezoelectric Drive and Arc Grating Closed-Loop

Active Axis: R-axis tilt

Drive Method: Piezoelectric inertial drive

Angular Positioning: High-precision angular positioning resolution

Stage Body Material: Aluminum alloy

Guiding Structure: Cross roller guide

Position Feedback: Arc grating

Product Models

RA Series, covering precision tilt requirements

RA Series: RA50-20

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Application Fields

Precision Angular Adjustment, Empowering Multiple Fields

With its excellent precision positioning capability, the ZEPTOOLS Nanopositioning Stage is widely used in the semiconductor industry, precision optical engineering, materials science research, biomedical, precision metrology and inspection, and aerospace, among many other fields. It deeply empowers micro/nano manufacturing, high-end instrument development, and frontier scientific experiments, serving as a critical core component in various high-precision equipment and research platforms.

Selected Customers

The trusted choice of numerous universities, research institutions, and enterprises

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Independently developed by ZEPTOOLS, providing selection consulting and in-depth customization solutions

Phone: +86-400-966-2800

Email: micage@zeptools.com