Micro & Nano Probe Station

Electrical characterization at the nanoscale
A fast, accurate, and stable micro & nano measurement platform

Piezoelectric drive | 4 probe heads | Nanoscale positioning

The Micro & Nano Probe Station is a compact micro & nano measurement system introduced by ZEPTOOLS, capable of electrically characterizing samples and test devices at the nanoscale. The entire machine is driven by piezoelectric ceramics. Each probe is equipped with a three-axis probe arm that can be independently adjusted in the X, Y, and Z directions. Precise nanoscale fine adjustment is achieved by moving only the upper slide rod, enabling fast and stable positioning.

The system supports mobile phone control, making operation intuitive and convenient. Combined with the SR-ScopeDriver free power measurement system, it can easily perform voltage and current measurements, meeting the I-V characteristic measurement needs of piezoelectric ceramics, MEMS, nanowires, and other micro & nano structures. The machine is highly integrated, with built-in designs such as a magnetic field interference measurement module and grounding and substrate voltage rails, making weak signal measurement more reliable. It can be used under various working conditions such as vacuum, atmosphere, and pure nitrogen atmosphere, and can also be extended to working platforms such as glove boxes, vacuum chambers, and optical test benches.