Probe Station Series

Room-Temperature Automated Nanoprobe Station

X/Y/Z/R multi-axis automatic positioning 
A highly reliable room-temperature precision testing platform

Motor-driven | 4 probe arms as standard | Compatible with 6/8/12 inches

The Room-Temperature Automated Nanoprobe Station is a highly reliable probe station system independently developed by ZEPTOOLS. It is mainly used in scientific research fields such as semiconductors/microelectronics, electronics, electromechanics, physics, chemistry, materials, optoelectronics, nanotechnology, MEMS, biochips, and aerospace, as well as in IC design, manufacturing, testing, and packaging.

The platform is equipped with a high-precision displacement stage that enables automatic adjustment in the X, Y, Z, and R directions, allowing fast and accurate positioning for array-type device measurements while balancing efficiency and precision. Being economical and practical, highly stable, upgradeable and expandable, and easy to operate are the core values of this product. It has been widely used in major universities, research institutes, and the semiconductor industry.

Main Technical Specifications

Multi-axis automatic positioning, fast and precise measurement

Product model: TZ-H-06

Probe arms: 4 as standard, 4~8 available (all equipped with Triax low-leakage cables)

Test diameter: 6/8/12 inches

Automatic positioning accuracy: X/Y/Z axis ±0.005mm, R axis ±0.05°

Microscope magnification: optical 0.5X~5.0X (optional 2X additional objective lens)

Probe frequency: 26GHz~100GHz (optional)

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Trusted by numerous universities, research institutions, and enterprises

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Independently developed by ZEPTOOLS, built for high-end applications

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Email Us micage@zeptools.com