Liquid Nitrogen Cryogenic Nanoprobe Station

Wide temperature range from 80K ultra-low temperature to 520K
A high-vacuum, high-precision device electrical performance testing platform

Liquid nitrogen refrigeration | 6 probe arms | Fiber optic connection available

The Liquid Nitrogen Cryogenic Nanoprobe Station is an ultra-high vacuum cryogenic testing platform designed specifically for electrical performance testing of semiconductor devices and micro/nano materials. It can operate stably over a wide temperature range of 80K~520K, providing a reliable cryogenic measurement environment for materials and device research at universities, research institutes, and enterprises across the country.

The system adopts liquid nitrogen refrigeration and a molecular pump high-vacuum chamber, with 6 probe arms and Triax low-leakage cables as standard. Combined with a continuous zoom microscope and a full HD digital camera, it enables precise electrical characterization from room temperature to deep cryogenic temperatures. It can also be connected to optical fibers, replacing electrical probes with optical fibers to meet special testing needs.

Main Technical Specifications

Ultra-high vacuum combined with ultra-low temperature, precise electrical characterization

Product model: LN-4H-06

Vacuum chamber: 5.0×10⁻³ Pa (room temperature), 2 user flange ports reserved

Probe system: 6 probe arms, adjustment accuracy ±0.01mm, equipped with Triax low-leakage cables

Microscopic observation: continuous zoom microscope 0.5X~5X, resolution better than 2µm, full HD digital camera

Temperature range: 80K~520K, temperature control stability better than ±0.5K

Sample specifications: compatible with 6 / 8 / 12 inches, 50mm square sample stage

Optional configurations: fiber optic connection available (replacing electrical probes with optical fibers), 4 probe arms, 1X~10X objective lens, 26~100GHz probe frequency

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Application Fields

Wide-temperature-range electrical characterization, empowering cutting-edge research

The Liquid Nitrogen Cryogenic Nanoprobe Station is widely used in electrical performance testing of two-dimensional materials, semiconductor devices, optoelectronic and thermoelectric materials. It covers multiple cutting-edge research areas from room temperature to deep cryogenic temperatures, including IV characteristics, variable-temperature transport, photoelectric response, thermoelectric properties, and gas-sensitive sensing. It is a powerful testing tool in the fields of micro/nano science and semiconductors.

Application Cases

All are from papers published using this equipment

1. Device electrical performance measurement in vacuum or atmospheric environment at room temperature
Example: IV curves and transfer curves of monolayer tungsten disulfide field-effect transistors

2. Variable-temperature IV performance measurement
Example: Variable-temperature transport study of tungsten disulfide/silicon van der Waals heterojunctions

3. Research on device optoelectronic performance (sensitivity, quantum efficiency, response speed, etc.)
Example: Ultrafast photoresponse study of InGaZnO superlattice nanowires

4. Research on thermoelectric performance of materials
Example: Using a vacuum differential thermal stage to measure the thermoelectric performance of materials