Automated Pressure Probe Station

Automated Pressure Probe Station

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Product Description

Probe Station Series

Automated Pressure Probe Station

For pressure sensor production lines  
Turnkey automated testing solution

Fully automatic whole-wafer testing | MEMS pressure chips | ATE2000 software platform

The Automated Pressure Probe Station is a turnkey integrated solution designed by ZEPTOOLS specifically for automated screening on pressure sensor production lines. The system consists of a temperature-controlled automated pressure probe station, automated testing software, matching probe cards, and test instruments. It supports different types of MEMS chip specifications, and the test data format can be customized for output as required.

The system is highly automated, supporting fully automatic whole-wafer testing, automatic chip probe alignment, and automatic software testing. It covers test parameters such as zero-point voltage, power consumption, and output signals under different pressures. The ATE2000 parametric automated testing software platform supports the definition and editing of test items, as well as the configuration and management of user permissions and test sequences. Data can be exported as CSV/EXCEL reports and uploaded to enterprise servers, truly serving production line testing. With a platform-based hardware and software structure, it can be expanded and upgraded for testing other devices and parameters.

Main Technical Specifications

Automated testing, built for production line screening

Product model: ATST 1500

Test diameter: 6 inches

Travel range: X-Y axis 150mm, Z axis 15mm, R axis 360°

Positioning accuracy: X/Y/Z axis ±0.005mm, R axis ±0.05°

Probe arm: adjustment travel X/Y 50mm each, adjustment accuracy 5µm

Microscope magnification: 0.5X~5.0X (when using 1X additional objective lens)

Probe frequency: 26GHz~100GHz (optional)

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Trusted by numerous universities, research institutions, and enterprises

Selected Customers

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Independently developed by ZEPTOOLS, built for high-end applications

Call Us +86-400-966-2800

Email Us micage@zeptools.com

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